R_eff and Σ_1kpc vs. stellar mass for the stellar continuum (first column) and Hα (second column) spatial distributions of star-forming galaxies at z ∼ 5.3 (FRESCO, this work), z ∼ 1 (3D-HST; Nelson et al. 2016a; Matharu et al. 2022), and at z ∼ 0.5 (CLEAR; Matharu et al. 2022). All measurements are from a stacking analysis with HST WFC3 and JWST NIRCam slitless spectroscopy. The best-fit lines are log-linear fits, the parameters for which are given in Table 1. The stellar continuum half-light radius of star-forming galaxies at z ∼ 5.3 is 2.6 times smaller and the central kiloparsec surface density 2.5 times higher than their z ∼ 1 counterparts at a fixed stellar mass of Log(M_*/M_⊙) = 9.5. For Hα, these values are 2.3 and 2.7, respectively.