Open Access
Table 1
Residual piston of each non-reference segment in different correction stages.
| Segment | Seg-1 | Seg-2 | Seg-3 | Seg-4 | Seg-6 | Seg-7 | WF/RMS |
|---|---|---|---|---|---|---|---|
| Load piston (nm) | −10 440 | 2875 | 4289 | −7942 | −7516 | −118 | 10.87λ |
| Coarse phasing residual (nm) | 106 | −106 | −118 | 117 | 52 | 141 | 0.18λ |
| Fine phasing residual (nm) | 24 | −47 | −36 | 34 | 27 | −25 | 0.05λ |
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