Open Access
Table 1
Parameters for spatial variations used for each case studied for each GSMT.
| Thickness Variation | ||||
|---|---|---|---|---|
| GSMT | Case 1 | Case 2 | Case 3 | Material |
| GMT | n = –1 | n = –2 | n = –3 | Al2O3 |
| ELT | 10% | 20% | 50% | Si3N4 |
| TMT | 10% | 20% | 50% | Si3N4 |
Notes. Peak-to-valley aberration applied is symmetric about zero and, as such, has positive and negative values. These randomly generated screens are then added to the nominal thicknesses described in Anche et al. (2023).
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