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Table 2
Dimensions of the central parts of the phase mask specified (specifications) and measured using a Wyko interferential microscope (measured dimensions).
Parameters | Specifications | Measured | Relative |
dimensions | differences | ||
|
|||
d1 | 65.29 μm | 64.60 μm | 1.1% |
Z1 | 449.7 nm | 446.0 nm | 0.8% |
d2 | 108.4 μm | 108.7 μm | 0.3% |
Z2 | 978.1 nm | 978.0 nm | <0.1% |
Notes. Relative differences between these two sets of parameters are given in percent.
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