Table 2
List of experiments.
Experiment | Thickness | R dep | T dep | T atom−add | Atom-fluence | t |
(ML) | (L/min) | (K) | (K) | (1016 atoms/cm2) | (min) | |
|
||||||
H![]() |
(O from O2) | |||||
H![]() |
2 | 0.12, 0.035 | 60 | 10 | 0.5 | 24 |
H![]() |
2 | 0.12, 0.035 | 60 | – | – | – |
O:O2 | 2 | 0.12, 0.035 | – | 10 | 0.5 | 24 |
H![]() |
2 | 0.12, 0.035 | 60 | 55 | 0.7 | 30 |
|
||||||
H2O, H![]() |
||||||
H2O+H![]() |
50:2 | 2.4, 0.08, 0.02 | 60 | 10 | 0.5 | 24 |
H2O+H![]() |
50:2 | 2.4, 0.08, 0.02 | 60 | 55 | 0.7 | 30 |
H2O+H![]() |
50:2 | 2.4, 0.08, 0.02 | 60 | – | – | – |
|
||||||
H![]() |
||||||
H![]() |
2 | 0.12, 0.035 | 60 | 55 | 0.5 | 24 |
H![]() |
2 | 0.12, 0.035 | 60 | – | – | – |
O:O2 | 2 | 0.12, 0.035 | – | 10 | 0.5 | 24 |
|
||||||
D![]() |
||||||
D![]() |
2 | 0.12, 0.035 | 60 | 55 | 0.5 | 24 |
D![]() |
2 | 0.12, 0.035 | 60 | – | – | – |
|
||||||
H![]() |
||||||
H![]() |
1.5:1.5 | 0.12, 0.035 | 60, 15 | – | – | – |
|
||||||
H![]() |
||||||
H![]() |
1.5:1.5 | 0.12, 0.035 | 60 | – | – | – |
Notes. The + and : signs indicate sequential deposition and codeposition, respectively. The thickness is expressed in monolayers (ML); Rdep is the deposition rate of a selected molecule expressed in Langmuir (L) min-1, where 1 L = 1.3 × 10-6 mbar s-1; Tdep is the substrate temperature during deposition; Tatom−add is the substrate temperature during O-atom addition; atom-fluence is the total fluence at the end of the experiment; t is the time of atom addition.
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