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Table 6
Tomographic error measured from numerical simulations (in nm rms).
| #A47 | #A53 | #A12 | |
|
|
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| σTomo (3 layers) | 161 | 220 | 201 |
| σPureTomo (15 layers) | 128 | 161 | 157 |
| Deduced σModel | 99 | 150 | 126 |
Notes. The model error is deduced by subtracting the 3 layer performance to the 15 layer one.
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