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Table 3

Technical requirements and achieved performance.

Specification Measured

Field of view in pupil (′) >10 >10
Delay range (mm) 0–120 0–137
rms wavefront error (nm) <25 16 ± 2
Tilt (′′) <1.5 0.3 ± 0.1
Differential tilt (′′) <0.75 <0.7
Transmission See Table 2
Resolution (nm) <2.5 2.5
Bandwidth (Hz) >200 380 ± 10
Lateral pupil stability (μm) <50 PTV 60 PTV

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