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Table 1

Summary of implantation yields in molecules ion-1.

Ions Energy Temperature Thickness Implantation yield References
/keV /K /μm /molecules ion-1

13C3+ 30 15 1.8 0.32 ±  0.07 This work
13C2+ 30 15 0.8 0.57 ±  0.13 This work
13C3+ 30 80 0.8 0.40 ±  0.09 This work
13C2+ 30 80 0.7 0.50 ±  0.11 This work
13C+ 30 16 0.6 0.47 ±  0.10 Strazzulla et al. (2003)
13C+ 30 77 0.6 0.42 ±  0.09 Strazzulla et al. (2003)

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