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Table 1
Summary of implantation yields in molecules ion-1.
| Ions | Energy | Temperature | Thickness | Implantation yield | References |
| /keV | /K | /μm | /molecules ion-1 | ||
|
|
|||||
| 13C3+ | 30 | 15 | 1.8 | 0.32 ± 0.07 | This work |
| 13C2+ | 30 | 15 | 0.8 | 0.57 ± 0.13 | This work |
| 13C3+ | 30 | 80 | 0.8 | 0.40 ± 0.09 | This work |
| 13C2+ | 30 | 80 | 0.7 | 0.50 ± 0.11 | This work |
| 13C+ | 30 | 16 | 0.6 | 0.47 ± 0.10 | Strazzulla et al. (2003) |
| 13C+ | 30 | 77 | 0.6 | 0.42 ± 0.09 | Strazzulla et al. (2003) |
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