Reduction of beam offset and tilt during the alignment procedure. (a) Decrease in focal offset, defined as p_B − p_WF. The red data points correspond to offsets along the z-axis, and the blue data points show offsets along the x-axis. (b) Decrease in beam tilts around the x- and z-axes. The focal offset and beam tilt are both illustrated as a function of the iteration number. Here, 0 corresponds to the setup in the hexapod home position and 1 to the initial optimised hexapod configuration. Subsequent iteration numbers correspond to steps of the iterative procedure proper. The lines are drawn between the data points to highlight the tendencies of the iterations.