Beam misalignment parameters vs. the hexapod DoF along the z-axis in millimeters. The ray-trace beam is evaluated in the warm focal plane, according to Fig. 1a. a) Beam offset Δx along the x-axis in mm. b) Beam offset ∆y along the y-axis in mm. Both offsets are calculated with respect to p_WF. c) Beam tilt θ_x around the x-axis in degrees, d) Beam tilt θ_y around the y-axis in degrees.