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Table 2.

Study cases for the influence of A, B, and C parameters of the Harvey model of the PSD 𝒫mod.

Case A (nm2 mm) B ( μm) C σr (nm)
ASPIICS 3.75 × 10−1 179 0.82 1.92 (λ/286)

A1 9.38 × 10−2 179 0.82 0.953 (λ/577)
A2 1.875 × 10−1 179 0.82 1.35 (λ/408)
A3 5.625 × 10−1 179 0.82 2.35 (λ/235)
A4 7.50 × 10−1 179 0.82 2.70 (λ/204)

B1 1.50 44.7 0.82 4.00 (λ/138)
B2 7.50 × 10−1 89.5 0.82 2.92 (λ/188)
B3 2.50 × 10−1 269 0.82 1.44 (λ/382)
B4 1.875 × 10−1 358 0.82 1.16 (λ/474)

C1 1.149 179 0.205 2.57 (λ/214)
C2 6.375 × 10−1 179 0.41 2.32 (λ/237)
C3 2.832 × 10−1 179 1.23 1.60 (λ/344)
C4 2.359 × 10−1 179 1.64 1.37 (λ/401)

Σ1 9.91 × 10−1 537 1.5 1.92 (λ/286)
Σ2 2.99 ×10−1 71.6 1.0 1.92 (λ/286)

Notes. Related RMS roughness σr is also given, computed for sA = 18.5 μm.

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