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Table 2.
Study cases for the influence of A, B, and C parameters of the Harvey model of the PSD 𝒫mod.
| Case | A (nm2 mm) | B ( μm) | C | σr (nm) |
|---|---|---|---|---|
| ASPIICS | 3.75 × 10−1 | 179 | 0.82 | 1.92 (λ/286) |
| A1 | 9.38 × 10−2 | 179 | 0.82 | 0.953 (λ/577) |
| A2 | 1.875 × 10−1 | 179 | 0.82 | 1.35 (λ/408) |
| A3 | 5.625 × 10−1 | 179 | 0.82 | 2.35 (λ/235) |
| A4 | 7.50 × 10−1 | 179 | 0.82 | 2.70 (λ/204) |
| B1 | 1.50 | 44.7 | 0.82 | 4.00 (λ/138) |
| B2 | 7.50 × 10−1 | 89.5 | 0.82 | 2.92 (λ/188) |
| B3 | 2.50 × 10−1 | 269 | 0.82 | 1.44 (λ/382) |
| B4 | 1.875 × 10−1 | 358 | 0.82 | 1.16 (λ/474) |
| C1 | 1.149 | 179 | 0.205 | 2.57 (λ/214) |
| C2 | 6.375 × 10−1 | 179 | 0.41 | 2.32 (λ/237) |
| C3 | 2.832 × 10−1 | 179 | 1.23 | 1.60 (λ/344) |
| C4 | 2.359 × 10−1 | 179 | 1.64 | 1.37 (λ/401) |
| Σ1 | 9.91 × 10−1 | 537 | 1.5 | 1.92 (λ/286) |
| Σ2 | 2.99 ×10−1 | 71.6 | 1.0 | 1.92 (λ/286) |
Notes. Related RMS roughness σr is also given, computed for sA = 18.5 μm.
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