Sputtering yield, normalized by the value obtained assuming normal incidence, as a function of the ion incidence angle, for three representative energies: 100 eV (squares), 1 keV (circles), and 10 keV (triangles). N₂ and CH₄ are displayed separately by the solid and open symbols, respectively. Different collision models and different categories of incident ions give very similar variations, and only the ZBL+Firsov results for incident CH are presented.