Free Access

Table 3

Rejection ratios in the broadband L filter for the optimized AGPMs.

Tuning R before Δh R after
Name process tuning [μm] tuning

AGPM-L9r Al deposition 30 + 0.40 100
AGPM-L9r2 Al deposition 100 + 0.38 400
AGPM-L11r Resist filling 70 −0.32 910
AGPM-L12r Resist filling 70 −0.42 470
AGPM-L13r Resist filling 110 −0.29 190

Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.

Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.

Initial download of the metrics may take a while.