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Table 3
Rejection ratios in the broadband L filter for the optimized AGPMs.
| Tuning | R before | Δh | R after | |
| Name | process | tuning | [μm] | tuning |
|
|
||||
| AGPM-L9r | Al deposition | 30 | + 0.40 | 100 |
| AGPM-L9r2 | Al deposition | 100 | + 0.38 | 400 |
| AGPM-L11r | Resist filling | 70 | −0.32 | 910 |
| AGPM-L12r | Resist filling | 70 | −0.42 | 470 |
| AGPM-L13r | Resist filling | 110 | −0.29 | 190 |
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