RCWA simulations showing the rejection ratio for a grating period of 1.42 μm on a 3.4−4.1 μm broadband filter. Top: fixed grating depth of 5.5 μm as a function of the line width wt and sidewall angle α. Middle: fixed sidewall angle of as a function of the grating depth h and line width wt. Bottom: fixed line width of 0.7 μm, as a function of the sidewall angle α and grating depth h.
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