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Cited article:

Fabrication of Superconducting Nb–AlN–NbN Tunnel Junctions Using Electron-Beam Lithography

Mikhail Yu. Fominsky, Lyudmila V. Filippenko, Artem M. Chekushkin, Pavel N. Dmitriev and Valery P. Koshelets
Electronics 10 (23) 2944 (2021)
https://doi.org/10.3390/electronics10232944