Open Access

Table 1

Comparison between specified and manufactured FPMs to simulate and build a Roman HLC for the THD2 testbed.

Bandwidth 700–780 nm 640–700 nm
Specs Measured Specs Measured
Mask diam. (μm) 456 455 416 414
Align. error (μm) 0 <2 0 <42
hSiO2 (nm) 400 400 320 318
hTiN (nm) 200 198 270 271

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