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Fig. 5


a) Frequency sweep across the array. Each dip in transmission corresponds to an individual resonator. The total resonator Q is dominatedby Qc and is in the range of 104 across the array as designed. The internal quality factors Qi approach 1 × 106. b) Resonance of a single LEKID responding to increasing optical power. The quasiparticle density nqp increases with optical loading, causing a shift in f0 and Q.

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