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Table 1
Dimensions of the phase mask from specifications and laboratory measurements using a Wyko interferometer, and relative differences in percent between both values.
| Parameters | Specification | Laboratory | Relative |
| measurement | difference | ||
|
|
|||
| Diameter d | 69.9 μm | 70.7 μm | 1.1% |
| Depth z | 814.1 nm | 814.6 nm | 0.1% |
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