Fig. 1
Scanning electron microscope (SEM) images of the NACO AGPM. a) Structure profile schematic, with h2 = 5 ± 0.1 μm, h1 = 1 ± 0.1 μm, and w = 0.65 ± 0.03 μm (the grating pitch is 1.42 μm). b) Zoom on the center of the diamond AGPM. c) Overview of the structure showing the uniformity and original cleanliness of this particular device.
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