Table 6: Measured characteristics of the VUV 10 pm interferometer.
Operating wavelength: $\lambda=155$ nm
Clear aperture : 25 mm
Coating reflectance: 0.77
Effective reflectance: 0.59
Reflective finesse: $F_{\rm R}=12$
Defect finesse: 6.8
Total finesse: 5.9
Optical gap: d=200 mm
Free spectral range: 61 pm
Passband width: 10 pm
Order: m=2580
Transmittance: $T=58\%$ (Loss $L=4.2\%$)

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