Table 5:
CIV VUV etalon parameters.
|
Scan |
A1(2) |
B1(2) |
C |
Gap ( m) |
201.6 |
205.2 |
200.0 |
| Effective reflectivity |
0.590 |
0.561 |
0.490 |
| Step size (nm) |
0.425 |
0.423 |
0.430 |
| Aperture size (mm) |
2 |
2 |
2 |
(nm) |
0.0616 |
0.0610 |
0.0620 |
| Measured FWHM (pm) |
11.56 |
11.48 |
12.30 |
| at 157 nm |
|
|
|
| Effective finesse |
5.34 |
5.27 |
5.05 |
| FWHM of F2 laser (pm) |
30(10) |
30 (10) |
10 |
| Finesse corrected for |
5.43 (5.71) |
5.36 (5.63) |
5.36 |
| F2 laser width |
|
|
|
| Reflectance finesse |
|
|
|
| 157 nm (R=0.74) |
10.4 |
10.4 |
10.4 |
| 155 nm (R=0.77) |
12.0 |
12.0 |
12.0 |
| Defect finesse |
6.37 (6.85) |
6.25 (6.70) |
5.88 |
| Effective finesse |
5.26 (5.95) |
5.54 (5.95) |
5.55 |
| at 155 nm (pm) |
|
|
|
Source LaTeX |
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