Table 2: Design parameters for the VUV 10 pm interferometer.
Operating wavelength: $\lambda=155$ nm

Clear aperture : 25 mm

Coating reflectance: 0.79

Effective reflectance: 0.65

Reflective finesse: $F_{\rm R}=7$

Defect finesse: 13

Total finesse: 6

Optical gap: d=200 mm

Free spectral range: 60 pm

Passband width: 10 pm

**Table 2:** Design parameters for the VUV 10 pm interferometer.
Operating wavelength: $\lambda=155$ nm
Clear aperture : 25 mm
Coating reflectance: 0.79
Effective reflectance: 0.65
Reflective finesse: $F_{\rm R}=7$
Defect finesse: 13
Total finesse: 6
Optical gap: d=200 mm
Free spectral range: 60 pm
Passband width: 10 pm

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