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Figure 2:
Simulated focused and defocused images (logarithmic scale). Noise is
added to obtain a |
Figure 3 shows a comparison between the input images of the
simulation and the PSFs being reconstructed by the estimated aberrations and
visualizes the quality of the aberration estimation. This visualization is
helpful to judge real calibration data when only in-focus and out-of-focus
images are available. Table 2 quantifies the performance of
wavefront estimation by comparing the true and the estimated Zernike
coefficients. On each coefficient a good accuracy is obtained: the errors are
less than a few nanometers. The maximum error is for the two astigmatisms. The influence of
on
estimation results is analyzed in Sect. 5.
The slight tip-tilt introduced between the two input images (
nm rms and
nm RMS) are estimated with a high precision, too. The error
amounts to less than 1% (the tip-tilt values are not shown in
Table 2). In the next section, we focus on the possible
sources for losses of estimation accuracy.
| Zernike number | true (nm) | estimated (nm) | error (nm) |
| 4 | 60.5 | 61.5 | 1 |
| 5 | -39.3 | -46.7 | 7.4 |
| 6 | 58.1 | 61.7 | 3.6 |
| 7 | -16.2 | -15.9 | 0.3 |
| 8 | -14.1 | -10.9 | 3.1 |
| 9 | -2.5 | -3.6 | 1.1 |
| 10 | 13.7 | 12.9 | 0.7 |
| 11 | -24.3 | -26. | 1.7 |
| 12 | 0.5 | 1.2 | 0.7 |
| 13 | -3.2 | -4.9 | 1.7 |
| 14 | 2.8 | 3.3 | 0.4 |
| 15 | -2.4 | -2.2 | 0.2 |
Copyright ESO 2003