Table 1: RMS after each step in the scanner-distortion correction.
Step rms x ( $\mu\rm m$ ) rms y ( $\mu\rm m$ )

Initial (uncorrected) 31.2 32.9

1-d function corrected 18.2 23.0

Correction cubic pattern 4.61 4.42

2nd iteration cubic pattern 4.52 4.31

**Table 1:** RMS after each step in the scanner-distortion correction.
Step	rms x ( $\mu\rm m$ )	rms y ( $\mu\rm m$ )
Initial (uncorrected)	31.2	32.9
1-d function corrected	18.2	23.0
Correction cubic pattern	4.61	4.42
2nd iteration cubic pattern	4.52	4.31

Source LaTeX | All tables | In the text